State-of-the-Art 8” Wafer MEMS Fab
Silex is the first dedicated pure-play MEMS foundry to offer its customers a Class 1-10 200mm fab, with state of the art equipment and capabilities. Committed to meeting our customers’ expectations today and into the future, we provide the industry’s most advanced process technologies in combination with state-of-the-art tool capability.
Our standard processes include proven technologies and proprietary processes such as the Silex Sil-Via® TSV and Zero-Crosstalk™ isolating substrate. Incorporating state-of-the-art deposition and electroplating equipment in our 8-inch fab enables us to offer unique functional capping technologies with integrated through-wafer metal vias, RF passives and coaxial feedthroughs—advanced technologies that are spearheading the MEMS industry in CMOS-to-MEMS integration.