Piezo PZT MEMS
- Sputtered PZT with Excellent film properties
- Uniformity Within Wafer
- Breakdown Voltage
- Piezoelectric Constant
- MTTF
- Integration of PZT in MEMS Process Flows
- Sil-Via® as electrical feedthrough
- Compatible with SOI/C-SOI/WLP
- Custom solutions
- Fully Equipped Production Line
- Deposition & Patterning
- Passivation
- Analysis (e.g. XRD, aixacct 4 point bender, HALT)
- Experience in µMirrors, Ink-Jet, pMUTs, Loudspeakers, Microphones, etc.

Piezo AlN MEMS – Aluminum Nitride
- AlN & AlScN Available
- Excellent Film Properties
- Within wafer Film Thickness (NU <0.5%)
- Within Wafer Stress (NU <100MPa)
- Low Rocking Curve FWHM
- Multiple Electrode materials
- Trimming Capabilities
- Individual Layer Trimming
- Frequency Trimming
- Process Integration for Many Applications
- e.g. Resonators, Microphones, RF Filters, Inertial Sensors, Fingerprint Sensors.
