Piezo PZT MEMS

  • Sputtered PZT with Excellent film properties
    • Uniformity Within Wafer
    • Breakdown Voltage
    • Piezoelectric Constant
    • MTTF
  • Integration of PZT in MEMS Process Flows
    • Sil-Via® as electrical feedthrough
    • Compatible with SOI/C-SOI/WLP
    • Custom solutions
  • Fully Equipped Production Line
    • Deposition & Patterning
    • Passivation
    • Analysis (e.g. XRD, aixacct 4 point bender, HALT)
    • Experience in µMirrors, Ink-Jet, pMUTs, Loudspeakers, Microphones, etc.
piezo-mems

Piezo AlN MEMS – Aluminum Nitride

  • AlN & AlScN Available
  • Excellent Film Properties
    • Within wafer Film Thickness (NU <0.5%)
    • Within Wafer Stress (NU <100MPa)
    • Low Rocking Curve FWHM
  • Multiple Electrode materials
  • Trimming Capabilities
    • Individual Layer Trimming
    • Frequency Trimming
  • Process Integration for Many Applications
    • e.g. Resonators, Microphones, RF Filters, Inertial Sensors, Fingerprint Sensors.
piezo-mems