Most of the steps in the MEMS manufacturing process are the same as those in the semiconductor industry. However, the production complexity of MEMS is considerably greater since they contain three-dimensional mechanical structures.
One of the keys to our success is our support to our customers in developing production-ready products. For instance, we include modeling and cooperative process feedback in the transfer project to make sure that every customer’s process is sufficiently robust to ensure production readiness. To achieve our goal to become the premier manufacturer of customized MEMS solutions to high tech industry, we provide differentiated service solutions to shorten ramp-up time, achieve high quality and lower manufacturing costs.
In contrast to the semiconductor industry, MEMS foundries need to manage a much wider range of processes. Although MEMS production may never reach the same high degree of standardization of CMOS ICs, Silex recognizes the urgent need for standardization within MEMS and has developed a technology for production rationalization. The new technology has vastly improved productivity and the capability to produce increasingly sophisticated products. A product process designed from a combination of standard process modules rather than from a set of customized processes will undeniably reduce set-up time and lessen development costs. The technique of using standardized modules not only creates a more efficient customer production process (minimizing settings and tool changes), but also enables the design of an elevated standardized production support.
We call them Standard Process Platforms. The Standard Process Platform has the benefit of being used in a multitude of products independent of product design or manufacturing methods. In addition to offering further robustness and production readiness to the customer’s design, the Standard Process Platform also provides a solid foundation for further innovation of the MEMS foundry offer.
Silex’s MEMS production is housed in a 25,000 square foot plant near Stockholm with a 29,000 square feet / 2,700 square meter clean room area holding the 8-inch / 200-mm wafer fab. To satisfy our customers’ ever-increasing production requirements, we continue to invest in capacity for high-volume MEMS manufacturing.