26 April, 2012

Silex Microsystems Receives VINNOVA Grant to Develop Magnetic MEMS Technology for Next-Generation Smartphone Applications

Silex Microsystems Receives VINNOVA Grant to Develop Magnetic MEMS Technology for Next-Generation Smartphone Applications

Award Highlights Silex’s MEMS Expertise and Advanced Met-Via® Technology Enabling Advanced Sensor Capabilities

Järfälla, Sweden, April 25, 2012 — Silex Microsystems, the world’s largest pure-play MEMS foundry, today announced that it has been awarded a nearly 3 million Swedish Kronor research grant from VINNOVA, the Swedish Governmental Agency for Innovation Systems, to develop cutting-edge ferromagnetic materials for use in MEMS devices powering next-generation smart phone applications.   Demonstrating the company’s proven MEMS technology development expertise and resources, Silex was one of the companies chosen out of 340 applicants for this highly regarded award.

“Magnetic MEMS is a key material for future MEMS products because it enables multi-axis sensor integration,” says Dr Thorbjörn Ebefors, Chief Technologist at Silex Microsystems. “Smartphone applications already include e-compass integration and multi-axis sensors are combining magnetic sensing with gyro functions to enable multiple degrees-of-freedom sensors to go to market. In addition, magnetic materials in combination with the Silex Met-Via® Through Silicon Via technology can enable a new generation of high value, high Q integrated inductors. This is a crucial development for high quality integrated passive devices integration and ‘Functional Capping’ solutions. This research brings new capabilities and materials to our customers for their next-generation product innovations.”

The aim of VINNOVA’s funding is to enable small and medium-sized enterprises to increase their competitiveness by investing in research and development, thus contributing to growth in Sweden. The award, under VINNOVA’s R&D programs titled “Forska & Vax,” was one of 63 programs granted, out of more than 340 proposals received.  In total, VINNOVA grants totaled approximately 68 million Swedish Kronor for R&D programs. The magnetic MEMS technology development program is expected to begin May 2012 and will run for 18 months at Silex. This comprehensive program includes materials selection, concept development, and prototyping runs.


VINNOVA, the Swedish Governmental Agency for Innovation Systems, invests in research and strengthens Sweden’s innovative capacity for competitiveness, sustainable development and growth. VINNOVA’s efforts range from programs for R&D projects in small companies and at universities, to long-term development of strong research and innovation environments that attract R&D investment and expertise from around the world.. For more information see www.vinnova.se/en

About Silex Microsystems

As the world’s largest pure-play MEMS foundry, Silex Microsystems is driving the sensory system revolution by partnering with the world’s most innovative companies to commercialize MEMS technologies that are changing the world.  Our unique expertise in providing cutting-edge MEMS foundry services, innovative process technologies and proven high volume production capabilities enable MEMS innovators to rapidly, cost-effectively and reliably commercialize and ramp products to high volume.  At Silex, customers work closely with the industry’s most knowledgeable and creative MEMS manufacturing experts and benefit from our global ecosystem of development partners to take MEMS to market faster. www.silexmicrosystems.com.

Silex Microsystems Public Relations:                                   

Kelly Karr

Tanis Communications

+1 (408) 718-9350

Silex, Silex Microsystems, and Met-Via are registered trademarks of Silex Microsystems. All other product or service names are the property of their respective owners. Copyright Silex Microsystems, 2012.

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