Alcatel receives Multiple DRIE Systems Order from Swedish MEMS Foundry Silex Microsystems
Annecy, France, November 21st, 2006 – Alcatel Micro Machining Systems a leading supplier of deep silicon etching equipment (DRIE) for MEMS and 3D Semiconductors, today announced that it has received a multiple systems repeat order from Silex Microsystems in Sweden for its new AMS 200 “I-Productivity” production tool for advanced Sensors technology.
Silex Microsystems, a manufacturer of customised Micro and Nano systems for biotech/life science, telecommunication and consumer electronics industries, has selected the Alcatel AMS 200 “I-Productivity” for multiple applications including the high volume products based on Silex Microsystems High Density Through Wafer Via Technology.
“We looked to purchase additional DRIE tools that allowed us to continue to service our customers’ demand for next generation Micro and Nano systems while meeting our rapidly increasing capacity needs, and the new ALCATEL AMS 200 ”I-Productivity” has demonstrated truly superior process yields and etch rates” said Jan Nerdal, CEO of Silex Microsystems.
“We are very pleased to be part of the great success and rapid expansion of a MEMS manufacturing leader such as Silex,” said Jean-Marc Gruffat, Director of Business Development for Alcatel Micro Machining Systems. “This contributes greatly to our strategy to provide world class support to our customers in MEMS foundry business around the globe. We consider Silex Microsystems repeat business for our new AMS 200 “I-Productivity” system one additionnal confirmation of a successfull product introduction.
The new Alcatel AMS 200 “I-Productivity” DRIE tool has recently been introduced in April 2006. The optimization of the Bosch process parameters have shown ultra high Silicon Etch Rate up to 32 µm/min, lower etch drift, extended cleaning frequency, limited edge exclusion with unrivaled uniformity and repeatability leading to excellent process yields.
About Alcatel Micro Machining Systems
Alcatel Micro Machining Systems (AMMS) is a subsidiary of Alcatel Vacuum Technology France located in Annecy, France. AMMS is specialized in designing, manufacturing, marketing and servicing deep plasma etching systems ( DRIE ) for the fabrication of Micro Electro Mechanical Systems and 3D Semiconductors. Its main application markets are the telecommunications, automotive, aerospace, computer peripherals, biomedical industries, power devices and wafer level packaging. http://www.adixen.com/
About Silex Microsystems
Silex Microsystems offers MEMS foundry manufacturing services in its fully equipped state-of-the-art 6″ wafer fab. With a team of skilled MEMS experts, Silex helps its customers to quickly take their design concepts to volume manufacturing. Since the company was founded in year 2000, Silex has completed the successful production launch of well over 100 MEMS products with over 60 customers around the globe. Silex is also continuously working on developing innovative processes as part of its foundry business offer, such as a high density through wafer via technology that enables true wafer level packaging and MEMS designs with significantly reduced form factor. The high density through wafer via technology has successfully been implemented in customized optical mirror arrays and silicon optical benches. Silex diversified market exposure, large customer base and clear strategy to not offer any own products to the market ensures Silex customers a solid and reliable long term MEMS supply. http://www.silexmicrosystems.com/